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Focusing on reactive magnetron sputter deposition, this handbook explores the fundamentals of this physical vapor deposition technique for growing compound thin films. It begins with clear explanations of key concepts and progresses to a more comprehensive model that addresses specific features of the process. The text covers essential aspects of thin film growth, includes illustrative examples, and presents challenges through questions. Additionally, readers have access to an extensive database of material and reactive gas combinations to enhance their understanding.
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Magnetrons, reactive gases and sputtering, Diederik Depla
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- Année de publication
- 2017
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