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Precision Nanometrology

Sensors and Measuring Systems for Nanomanufacturing

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372pages
Temps de lecture
14heures

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Focusing on the latest advancements in optical sensors, the book explores their application in precision nanometrology for measuring angle and displacement. It details scanning-type measuring systems designed for analyzing surface forms and stage motions, complemented by algorithms and experimental data that enhance understanding and implementation.

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Precision Nanometrology, Wei Gao

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Année de publication
2014
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