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Focusing on the coordination of two subsystems within Automatic Material Handling Systems (AMHS) in semiconductor manufacturing, this book delves into modeling, performance evaluation, and practical applications. It emphasizes resource dispatch and optimization through operational research, supported by case studies. Designed for researchers and engineers, it serves as a vital reference in the fields of manufacturing and management, offering systematic insights into improving operational efficiency.
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Wafer Fabrication, Liang-Jie Zhang
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- Année de publication
- 2018
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