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Mechanical properties of thin films studied by bulge testing

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Benoit Merle

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The bulge test is a method of choice for investigating the mechanical behavior of freestanding films as thin as a few hundreds of nanometers. The work presented in this book extends the scope of this technique to the study of the fracture, time-dependent and fatigue properties of different kinds of membranes, with applications to gold and silicon nitride samples. These results were achieved during a PhD thesis performed at the Institute for General Materials Properties of the Materials Science Department at the Friedrich-Alexander-University Erlangen-Nürnberg.

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Mechanical properties of thin films studied by bulge testing, Benoit Merle

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Année de publication: 2013

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Titre: Mechanical properties of thin films studied by bulge testing
Langue: Anglais
Auteurs: Benoit Merle
Éditeur: FAU Univ. Press
Publié: 2013
ISBN10: 3944057082
ISBN13: 9783944057088
Séries: FAU-Studien Materialwissenschaft und Werkstofftechnik
Mots clés: Manuels, Manuels universitaires
Description: The bulge test is a method of choice for investigating the mechanical behavior of freestanding films as thin as a few hundreds of nanometers. The work presented in this book extends the scope of this technique to the study of the fracture, time-dependent and fatigue properties of different kinds of membranes, with applications to gold and silicon nitride samples. These results were achieved during a PhD thesis performed at the Institute for General Materials Properties of the Materials Science Department at the Friedrich-Alexander-University Erlangen-Nürnberg.