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The goal of this work is to develop a novel interferometric method for roughness measurement. Contrary to conventional approaches, the depolarization of the scattered light by the rough sample is considered, leading to a more accurate estimation of the roughness in the sub-wavelength domain and at the same time non-destructive and fast measurements. Compared to earlier works, the more general theory allows the application to other optical devices where depolarization of light occurs.
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Polarization-Sensitive Speckle Interferometer for Roughness Measurement, Franziska Theresa Brändle
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- 2023
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