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Thomas Sulzbach

    PRONANO
    • Micromechanical cantilevers are vital for exploring surface topography and forces at the nanoscale. Over two decades after atomic force microscopy (AFM) was introduced, this technology remains crucial for nanotechnology researchers. However, cantilever-based transducers are not widely used in mass production due to limited detection areas and serial data acquisition, which restrict throughput and operational range. The PRONANO project aimed to address these challenges by enabling massive parallelization of cantilever transducers for efficient nanoscale data acquisition. An interdisciplinary consortium, including SMEs in cantilever technology, nano-precision scanning, electronics, semiconductor industry leaders, and renowned university research groups, collaborated to develop the next generation of AFM for high-throughput, parallel surface scanning with nanometer resolution and nanonewton sensitivity. The project's proceedings introduce microcantilever technology and summarize its major findings through 23 scientific publications. Innovations included advanced cantilever fabrication techniques that transformed simple AFM probes into complex nano-electromechanical systems, integrating sensitive deflection detectors and efficient actuation mechanisms. High-density solder bump packaging and multi-channel application-specific integrated circuits were developed for streamlined AFM controller functionality. A laser interferometer-con

      PRONANO