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This book is designed for scientists and engineers in micro- and nano electro-mechanical systems (MEMS and NEMS), focusing on the development of cantilever-based sensor systems using CMOS-compatible micromachining. It serves as a valuable resource for researchers interested in cantilever and resonant sensors. Readers will explore the synergy between IC fabrication technology, particularly CMOS, and silicon micromachining, leading to advanced microstructures like cantilever beams. The integration of these technologies aims to create smart microstructures and integrated microsystems with on-chip driving and signal conditioning circuitry, now referred to as CMOS MEMS or CMOS NEMS. The book discusses post-processing micro- or nano-machining techniques applied to finished CMOS wafers, based on research conducted at the Physical Electronics Laboratory of ETH Zurich. This research involves arrays of cantilever transducers equipped with on-chip circuitry, which are utilized in Scanning Probe Microscopy (SPM) for the sensitive detection of physical quantities such as forces and mass changes. The content is organized into three parts, beginning with an introduction to the general aspects of cantilever resonators, including their resonant behavior and various driving and sensing mechanisms.
Achat du livre
CMOS cantilever sensor systems, Dirk Lange
- Langue
- Année de publication
- 2002
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